High-Yield Processing and Single-Mode Operation of Passive Antiguide Region Vertical-Cavity Lasers

We report the first continuous-wave (CW) operation single-mode, low-threshold, passive antiguide region (PAR) vertical-cavity surface-emitting laser (VCSEL) using organometallic chemical vapor deposition (OMCVD) for the regrowth of the PAR structure. With improved laser wafer design, fabrication process and regrowth design, a stable single fundamental mode at high currents has been achieved experimentally for laser aperture as large as 16 m diameter. Single-mode power of 1.7 mW is achieved with more than 20-dB high-order mode suppression. The lasers show a more than 99% yield with high uniformity. Isolation etch and wet-thermal oxidation are used to study and eliminate the finite-leakage current in the PAR VCSEL’s. Using multimode rate equations in conjunction with beam propagation method, single-mode lasing criteria is derived for PAR VCSEL. PAR VCSEL is shown to be a very efficient structure to meet the single-mode lasing condition.